PANews
PANews|Aug 12, 2026 01:55
[Samsung Electronics Plans to Achieve Commercial Application of High NA EUV at the 1nm Process Node] According to the 'Sci-Tech Innovation Board Daily,' Samsung Electronics plans to commercialize High NA EUV equipment at the 1nm process node. Park Chang-min, from Samsung Electronics' wafer foundry process development team, stated that for the upcoming nodes of 2nm SF2 and 1.4nm SF1.4, High NA EUV lithography patterning technology is still not considered mature. However, higher patterning resolution will become a necessity at the 1nm level. Therefore, Samsung Foundry is targeting this goal and collaborating with partners for joint development. Considering that Samsung Foundry previously set 2029 as the mass production timeline for SF1.4 and plans to launch an improved SF1.4+ in 2030, the 1nm node is unlikely to be introduced before 2030 at the earliest.
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