China's independent DUV lithography machine has started mass production, and Changxin Storage may become one of the first application customers On July 27th, according to sources cited by The Information, a company supported by Chinese state-owned capital has started mass producing independently developed DUV (deep ultraviolet) lithography machine manufacturing equipment, which is an important progress in promoting domestic substitution in China's semiconductor industry. It is reported that the company plans to produce about 5 DUV lithography machines in 2026 and expand to about 20 machines in 2027. Although there is still a gap in production capacity with Dutch lithography giant ASML (ASML delivered 131 sets of immersion DUV lithography systems last year), the breakthrough in mass production of domestically produced DUV equipment means that China's chip manufacturing supply chain is further moving towards independent and controllable development. According to sources, this batch of domestically produced DUV lithography machines is planned to be delivered to major chip manufacturers in China, including SMIC, Huahong Semiconductor, and storage chip manufacturer Changxin Storage. Among them, Changxin Storage, as a representative enterprise of China's DRAM industry, is expected to become an important application of domestically produced advanced semiconductor manufacturing equipment. If domestic DUV equipment can achieve stable operation in the production lines of manufacturers such as Changxin Storage, it will further reduce China's storage chip industry's dependence on overseas key equipment. [Original link]